Wiring-buried glass substrate, and inertial sensor element and inertial sensor using same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10609817
APP PUB NO 20180168034A1
SERIAL NO

15577011

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Abstract

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A wiring-buried glass substrate includes a glass substrate and a first wiring. The glass substrate includes a first surface, a second surface perpendicular to the first surface, and a third surface facing the first surface. The first wiring includes a first pillar portion and a first beam portion. The first pillar portion extends in a first direction perpendicular to the first surface of the glass substrate. The first beam portion is connected to a first surface of the first pillar portion and extends to a second direction perpendicular to a second surface of the glass substrate. The first wiring is buried in the glass substrate. The first surface of the first beam portion is exposed from a third surface of the glass substrate.

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Patent Owner(s)

Patent OwnerAddress
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTDOSAKA JAPAN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoyagi, Takanori Osaka, JP 3 0
Goda, Kazuo Osaka, JP 32 120
Meshii, Ryosuke Osaka, JP 7 49
Shinohara, Takahiro Hyogo, JP 5 68
Yamamoto, Kensaku Osaka, JP 53 484
Yoshida, Hitoshi Osaka, JP 161 1599

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