Wiring-buried glass substrate, and inertial sensor element and inertial sensor using same

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United States of America

PATENT NO 10609817
APP PUB NO 20180168034A1
SERIAL NO

15577011

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Abstract

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A wiring-buried glass substrate includes a glass substrate and a first wiring. The glass substrate includes a first surface, a second surface perpendicular to the first surface, and a third surface facing the first surface. The first wiring includes a first pillar portion and a first beam portion. The first pillar portion extends in a first direction perpendicular to the first surface of the glass substrate. The first beam portion is connected to a first surface of the first pillar portion and extends to a second direction perpendicular to a second surface of the glass substrate. The first wiring is buried in the glass substrate. The first surface of the first beam portion is exposed from a third surface of the glass substrate.

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Patent Owner(s)

Patent OwnerAddress
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD22-6 MOTO-MACHI KADOMA-SHI OSAKA 571-0057

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoyagi, Takanori Osaka, JP 5 2
Goda, Kazuo Osaka, JP 38 281
Meshii, Ryosuke Osaka, JP 7 53
Shinohara, Takahiro Hyogo, JP 8 72
Yamamoto, Kensaku Osaka, JP 67 621
Yoshida, Hitoshi Osaka, JP 176 2158

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