Compositions and methods that promote charge complexing copper protection during low pKa driven polymer stripping

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United States of America Patent

PATENT NO 10613442
SERIAL NO

15554578

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Abstract

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The present invention is a charge complexing chemical composition that protects metal during polymer removal. The polymer coatings include crosslinked systems by chemical-amplification and photoacid generated (PAG) means as in epoxies. The system includes a solvent, a charge complexing additive, and an acid that creates a protective complex for sensitive metals during the dissolving and rinsing practice needed for processing microelectronic parts. The composition can be utilized with a method for removing partial and fully cured crosslinked coatings that originate from chemical amplification or PAG-epoxy photoimageable coatings.

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Patent Owner(s)

Patent OwnerAddress
MERCK PATENT GMBHFRANKFURTER STRASSE 250 DARMSTADT 64293

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Moore, John Cleaon Camarillo, US 24 143

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