Temperature sensor based on ratio of clock signals from respective MEMS resonators

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United States of America Patent

PATENT NO 10622973
SERIAL NO

16292198

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Abstract

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In a high resolution temperature sensor, first and second MEMS resonators generate respective first and second clock signals and a locked-loop reference clock generator generates a reference clock signal having a frequency that is phase-locked to at least one of the first and second clock signals. A frequency-ratio engine within the MEMS temperature sensor oversamples at least one of the first and second clock signals with the reference clock signal to generate a ratio of the frequencies of the first and second clock signals.

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Patent Owner(s)

Patent OwnerAddress
SITIME CORPORATION5451 PATRICK HENRY DRIVE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Partridge, Aaron Cupertino, US 151 2545
Roshan, Meisam Heidarpour Sunnyvale, US 3 10
Tabatabaei, Sassan Sunnyvale, US 45 323
Zaliasl, Samira Eindhoven, NL 5 13

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