Stage device and charged particle beam device
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United States of America Patent
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Sep 8, 2020
Grant Date -
Jul 25, 2019
app pub date -
Jul 12, 2017
filing date -
Aug 30, 2016
priority date (Note) -
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Abstract
The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.
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