Heat treatment apparatus
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United States of America Patent
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Sep 22, 2020
Grant Date -
Sep 7, 2017
app pub date -
Feb 27, 2017
filing date -
Mar 3, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A heat treatment apparatus includes: a furnace core tube made of silica glass; a heater provided adjacent to the furnace core tube, the heater heating a heating region; and a moving mechanism supporting a porous glass base material and relatively moving the porous glass base material with respect to the heater in the furnace core tube in a state where the heating region is heated by the heater to make the porous glass base material pass through the heating region. The heat treatment apparatus includes a thin-walled part provided in a region adjacent to a portion located in the heating region in the furnace core tube, the thin-walled part having a thickness of glass less than that of the portion located in the heating region.
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