Consolidated filter arrangement for devices in an RF environment
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United States of America Patent
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Oct 27, 2020
Grant Date -
Jun 7, 2018
app pub date -
Jan 12, 2018
filing date -
Nov 26, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A heating system includes a first plurality of heating elements disposed within an electrostatic chuck and an electrically conductive housing. The heating system further includes one or more switching devices to control temperatures output by the first plurality of heating elements. The heating system further includes a converter that is electrically coupled to the one or more switching devices and disposed within the electrically conductive housing. The electrically conductive housing and the first plurality of heating elements are to operate in a radio frequency (RF) environment. A second plurality of elements are to operate outside of the RF environment. The converter is to communicate with a controller outside of the RF environment via a non-conductive communication link. The controller is to receive a process recipe and is to control the first plurality of heating elements and the second plurality of elements substantially simultaneously based on the process recipe.
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