Consolidated filter arrangement for devices in an RF environment
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United States of America Patent
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Oct 27, 2020
Grant Date -
Jun 7, 2018
app pub date -
Jan 12, 2018
filing date -
Nov 26, 2014
priority date (Note) -
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Abstract
A method includes generating, based on a process recipe, a first electrical control signal by a processing device external to a particular radio frequency (RF) environment. The method further includes converting the first electrical control signal into an alternative control signal, transmitting the alternative control signal to a converter within the particular RF environment over a non-conductive communication link, and converting the alternative control signal into a second electrical control signal by the converter. The method further includes controlling a first plurality of elements via one or more switching devices using the second electrical control signal. The method further includes generating, based on the process recipe, a third signal by the processing device and controlling a second plurality of elements disposed outside of the RF environment using the third signal. The first plurality of elements and the second plurality of elements are controlled substantially simultaneously based on the process recipe.
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