Apparatus for treating substrate

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10831103
APP PUB NO 20200081347A1
SERIAL NO

16565661

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Abstract

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An apparatus for treating a substrate includes a developing chamber that performs a developing process on the substrate by supplying a developing solution, a supercritical chamber that treats the substrate by supplying a supercritical fluid, and a transfer chamber having a transfer unit that transfers the substrate W between the developing chamber and the supercritical chamber.

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Patent Owner(s)

  • SEMES CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Hae-Won Daejeon, KR 43 275
Choi, Kihoon Cheonan-si, KR 31 59
Heo, Chan Young Hwaseong-si, KR 13 31
Jeong, Ji Soo Seoul, KR 7 12
Kim, Do Heon Cheonan-si, KR 18 177
Koriakin, Anton Cheonan-si, KR 16 27
Lee, Jaeseong Hwaseong-si, KR 21 31

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