Metal resistors with a non-planar configuration

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United States of America Patent

PATENT NO 10832839
SERIAL NO

16570575

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Abstract

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Device structures and fabrication methods for an on-chip resistor. A dielectric layer includes a trench with a bottom and a sidewall arranged to surround the bottom. A metal layer is disposed on the dielectric layer at the sidewall of the trench. The metal layer includes a surface that terminates the metal layer at the bottom of the trench to define a discontinuity that extends along a length of the trench.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES U S INC400 STONEBREAK ROAD EXTENSION MALTA NY 12020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Beasor, Scott Greenwich, US 35 188
Gu, Sipeng Clifton Park, US 70 162
Shu, Jiehui Clifton Park, US 101 232
Wang, Haiting Clifton Park, US 155 607

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