Correction of fabricated shapes in additive manufacturing using sacrificial material
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United States of America Patent
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Jan 5, 2021
Grant Date -
Nov 29, 2018
app pub date -
Jan 17, 2018
filing date -
May 25, 2017
priority date (Note) -
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Abstract
A method of fabricating a polishing pad using an additive manufacturing system includes depositing a first set of successive layers onto a support by droplet ejection. Depositing the first set of successive layers includes dispensing a polishing pad precursor to first regions corresponding to partitions of the polishing pad and dispensing a sacrificial material to second regions corresponding to grooves of the polishing pad. A second set of successive layers is deposited by droplet ejection over the first set of successive layers. The second set of successive layers corresponds to a lower portion of the polishing pad. The first set of successive layer and the second set of successive layers provide a body. The body is removed from the support. Removing the sacrificial material from the body provides the polishing pad with a polishing surface that has the partitions separated by the grooves.
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