Micromechanical z-inertial sensor

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United States of America Patent

PATENT NO 10899603
APP PUB NO 20190135612A1
SERIAL NO

16178716

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Abstract

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A micromechanical z-inertial sensor, having a movable MEMS structure developed in a micromechanical function layer; a torsion spring connected to the movable MEMS structure; and a spring device connected to the torsion spring, the spring device being developed to hamper a deflection of the torsion spring orthogonal to a sensing direction of the MEMS structure in a defined manner.

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Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHPOSTFACH 30 02 20 STUTTGART 70442

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boessendoerfer, Ralf Dinkelsbuehl, DE 5 21
Reinmuth, Jochen Reutlingen, DE 150 702
Waldmann, Jan Reutlingen, DE 3 6

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