Mask assembly and haze acceleration method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10983430
APP PUB NO 20190258155A1
SERIAL NO

15902903

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Abstract

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A method of testing a photomask assembly is disclosed. The method includes placing a photomask assembly into a chamber. The photomask assembly includes a pellicle attached to a first side of a photomask. The method further includes exposing the photomask assembly to a radiation source in the chamber. The exposing of the photomask assembly includes illuminating an entirety of an area of the photomask covered by the pellicle throughout an entire illumination time.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsieh, Kun-Lung Kaohsiung, TW 23 25
Ko, Wu-Hung Tainan, TW 7 4
Wen, Chih-Wei Tainan, TW 53 27

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