Method of manufacturing inductors in BEOL with particulate magnetic cores

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10984948
APP PUB NO 20180218824A1
SERIAL NO

15801926

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Abstract

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A method for forming an inductor device. The method comprises forming a trench within a central core region of a conductive coil formed within a dielectric material. The method further comprises forming a composite region within the trench. The composite region including a polymer matrix having a plurality of particles with magnetic properties dispersed therein with the central core region to reduce eddy current loss and increase energy storage.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kothandaraman, Chandrasekharan New York, US 140 1316
O'Sullivan, Eugene J Nyack, US 123 1664
Wang, Naigang Ossining, US 102 443

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