Integrated bound-mode spectral/angular sensors

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United States of America

PATENT NO 10989590
APP PUB NO 20200003613A1
SERIAL NO

16542505

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Abstract

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A 2-D sensor array includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate. Each pixel includes a coupling region and a junction region, and a slab waveguide structure disposed on the semiconductor substrate and extending from the coupling region to the region. The slab waveguide includes a confinement layer disposed between a first cladding layer and a second cladding layer. The first cladding and the second cladding each have a refractive index that is lower than a refractive index of the confinement layer. Each pixel also includes a coupling structure disposed in the coupling region and within the slab waveguide. The coupling structure includes two materials having different indices of refraction arranged as a grating defined by a grating period. The junction region comprises a p-n junction in communication with electrical contacts for biasing and collection of carriers resulting from absorption of incident radiation.

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Patent Owner(s)

Patent OwnerAddress
UNM RAINFOREST INNOVATIONS101 BROADWAY BLVD NE SUITE 1100 ALBUQUERQUE NM 87102 87102

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brueck, Steven R J Albuquerque, US 103 1830
Neumann, Alexander Albuquerque, US 43 460
Zarkesh-Ha, Payman Albuquerque, US 34 189

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