Methods and apparatus for waveguide metrology

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United States of America Patent

PATENT NO 11029206
APP PUB NO 20200141802A1
SERIAL NO

16670976

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Abstract

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Embodiments described herein relate to apparatus for measuring and characterizing performance of augmented and virtual reality waveguide structures utilizing glass substrates. The waveguide performance measuring systems generally include a light source configured to direct light towards an incoupling grating area on waveguide and one or more light detectors configured to collect light from an outcoupling grating area on a second side of the waveguide. The light source and one or more light detectors are disposed on one or more adjustable stages positioned about the waveguide. In certain embodiments, the one or more adjustable stages are configured to move in a linear fashion or revolve and/or rotate around the waveguide in an orbital motion.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fu, Jinxin Fremont, US 63 45
Godet, Ludovic Sunnyvale, US 327 3246
Meyer, Timmerman Thijssen Rutger San Jose, US 90 181

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