Etching solution for tungsten and GST films

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United States of America Patent

PATENT NO 11035044
APP PUB NO 20180209049A1
SERIAL NO

15872620

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Abstract

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Described herein is an etching solution suitable for both tungsten-containing metals and GST metals, which comprises: water; at least one phenolic derivative compound having at least two hydroxyl groups; at least one strong base selected from the group consisting of (i) a quaternary base; (ii) an organic amine; and (iii) a metal hydroxide; optionally an ammonium salt of an organic acid; and optionally a water-miscible solvent, wherein the pH of the etching solution is 10 or greater, and wherein the etching solution is substantially free of a peroxide oxidizer and a metal ion-containing oxidizer.

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Patent Owner(s)

Patent OwnerAddress
VERSUM MATERIALS US LLC8555 SOUTH RIVER PARKWAY PATENT DEPT TEMPE AS 85284

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Tianniu Westford, US 68 1123
Han-Adebekun, Gang Chris Center Valley, US 4 21
Lee, Yi-Chia Hsin Chu, TW 50 205
Liu, Wen Dar Chupei, TW 41 209
Sun, Laisheng Gilbert, US 16 103

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