Film forming method for metal film and film forming apparatus for metal film

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United States of America Patent

PATENT NO 11035049
APP PUB NO 20190093247A1
SERIAL NO

16135586

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Abstract

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A solid electrolyte membrane is disposed between an anode and a substrate, and voltage is applied between the anode and the substrate while the solid electrolyte membrane is pressed onto the substrate so as to form a metal film on the substrate. In this film forming method, there is used the solid electrolyte membrane that includes: a first portion made of an ion permeable material; and a second portion made of a material having an electric insulating property and having a low permeability of metallic ions, the second portion being embedded in the first portion so as to be exposed from a surface of the solid electrolyte membrane, the surface of the solid electrolyte membrane facing the substrate.

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Patent Owner(s)

Patent OwnerAddress
TOYOTA JIDOSHA KABUSHIKI KAISHA1 TOYOTA-CHO TOYOTA-SHI AICHI-KEN 471-8571

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iisaka, Hirofumi Nagoya, JP 23 141

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