Ceramic member

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United States of America Patent

PATENT NO 11043401
APP PUB NO 20180308722A1
SERIAL NO

15941040

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A ceramic heater includes an RF plate having a placement surface on which a wafer is to be placed, and made of a ceramic sintered body in which an RF electrode is embedded; and a heater plate made of a ceramic sintered body in which a heater is embedded, the RF plate and the heater plate being joined with a space interposed therebetween on a side opposite to the placement surface. The relationship among a minimum height H (mm) of the space in a direction perpendicular to the placement surface, a proportion A of a total area of portions where the RF plate and the heater plate are joined, with respect to an area of a plane along the placement surface that is defined by an outer edge of the placement surface, and a distance D (mm) between the RF electrode and the heater, satisfies H/A≤1000 and H/A+(D−H)/(1−A)≥14.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
NITERRA CO LTDNAGOYA-SHI AICHI 461-0005

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kitabayashi, Tetsuo Sendai, JP 17 692
Umeki, Toshiya Sendai, JP 5 15

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