Lamp infrared radiation profile control by lamp filament design and positioning
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United States of America Patent
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Jul 6, 2021
Grant Date -
Apr 11, 2019
app pub date -
Sep 13, 2018
filing date -
Oct 6, 2017
priority date (Note) -
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Abstract
Methods and apparatus disclosed herein generally relate to lamp heating of process chambers used to process semiconductor substrates. More specifically, implementations disclosed herein relate to arrangement and control of lamps for heating of semiconductor substrates. In some implementations of the present disclosure, fine-tuning of temperature control is achieved by dividing different lamps within an array of lamps into various subgroups or lamp assemblies defined by a specific characteristic. These various subgroups may be based on characteristics such as lamp design and/or lamp positioning within the processing chamber.
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