Correction of fabricated shapes in additive manufacturing using initial layer

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United States of America Patent

PATENT NO 11059149
APP PUB NO 20180339401A1
SERIAL NO

15873799

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Abstract

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Data indicative of a desired shape of the polishing pad to be fabricated by droplet ejection by the additive manufacturing system is received. The data includes a desired shape defining a desired profile including a polishing surface having one or more partitions separated by one or more grooves on the polishing pad. Data indicative of distortions from the desired profile caused by dispensing of layers by droplet ejection by the additive manufacturing system is generated. Data indicative of an initial layer to dispense by droplet ejection is generated to at least partially compensate for the distortions from the desired profile. The initial layer is dispensed on a support by droplet ejection. Overlying layers are dispensed on the initial layer by droplet ejection by the additive manufacturing system to form the polishing pad.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fung, Jason Garcheung Santa Clara, US 22 143
Redfield, Daniel Morgan Hill, US 65 1172
Yamamura, Mayu Felicia San Carlos, US 12 55

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