Gamma ray generator, gamma ray lithography system and method of performing gamma ray lithography

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United States of America Patent

PATENT NO 11067898
APP PUB NO 20210033980A1
SERIAL NO

16896218

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Abstract

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One of gamma ray lithography systems includes a gamma ray generator and a wafer stage. The gamma ray generator is configured to generate a substantially uniform gamma ray. The gamma ray generator includes a plurality of gamma ray sources and a rotational carrier. The rotational carrier is configured to hold the gamma ray sources and rotate along a rotational axis. The wafer stage is disposed below the gamma ray generator and configured to secure a wafer.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chou, You-Hua Hsinchu, TW 118 1212
Chuang, Kuo-Sheng Hsinchu, TW 52 211

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