Apparatus for adjusting a pedestal assembly for a reactor

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United States of America Patent

PATENT NO 11088015
APP PUB NO 20190109037A1
SERIAL NO

16210440

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Abstract

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The invention is directed to an alignment assembly for changing the relative position of a plate of a pedestal assembly with respect to a processing chamber of a reactor. The alignment assembly is connected at a first end to a riser shaft of the heating assembly and at a second end to a drive shaft. One or more portions of the alignment assembly may be selectively axially rotated or laterally moved change the relative position of the plate with respect to the processing chamber as desired.

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Patent Owner(s)

Patent OwnerAddress
ASM IP HOLDING B VVERSTERKERSTRAAT 8 ALMERE 1322AP

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Halpin, Michael Scottsdale, US 11 5804

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