Semiconductor power device

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United States of America Patent

PATENT NO 11094814
APP PUB NO 20190103482A1
SERIAL NO

15720564

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Abstract

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A semiconductor power device includes a substrate, a buffer structure formed on the substrate, a barrier structure formed on the buffer structure, a channel layer formed on the barrier structure, and a barrier layer formed on the channel layer. The barrier structure includes a first functional layer on the buffer structure, a first back-barrier layer on the first functional layer, and an interlayer between the first back-barrier layer and the first functional layer. A material of the first back-barrier layer comprises Alx1Ga1-x1N, a material of the first functional layer comprises Alx2Ga1-x2N, 0

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Patent Owner(s)

Patent OwnerAddress
EPISTAR CORPORATIONHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Tsung-Cheng Hsinchu, TW 8 24
Liu, Chia-Cheng Hsinchu, TW 38 144
Tu, Shang-Ju Hsinchu, TW 7 17
Yang, Ya-Yu Hsinchu, TW 11 37

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