Substrate treating apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11114316
APP PUB NO 20180025921A1
SERIAL NO

15654035

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Disclosed is a substrate treating apparatus that treats a substrate with processing liquids. The apparatus includes a substrate holder, an exterior cup, and an interior cup. The interior cup includes an interior cup body, and an interior cup outlet. The exterior cup includes an exterior cup body, an exterior bottom cup, a first drain outlet, a first exhaust port, a second drain outlet, a second exhaust port, and a separation partition. The apparatus further includes an annular member movable upwardly/downwardly, and a drive unit that causes the annular member to move to shift the interior cup body between a collecting position and a retracting position.

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Patent Owner(s)

Patent OwnerAddress
SCREEN HOLDINGS CO LTDKYOTO-SHI KYOTO 602-8585

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harayama, Chiho Kyoto, JP 1 2
Kabune, Kota Kyoto, JP 4 12
Kashiyama, Masahito Kyoto, JP 21 95
Nishiyama, Koji Kyoto, JP 77 536
Takahashi, Yasuo Kyoto, JP 110 1009

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