Method of removal of sharp corners from diffuser plate

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United States of America Patent

PATENT NO 11123837
APP PUB NO 20190193233A1
SERIAL NO

15853548

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Abstract

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Methods for manufacturing a diffuser plate for a PECVD chamber are provided. The methods provide for applying a compliant abrasive medium to round the sharp edges at corners of the output holes on a contoured downstream side of a gas diffuser plate. By rounding the edges of the output holes reduces the flaking of deposited materials on the downstream side of the gas diffuser plate and reduces the amount of undesirable particles generated during the PECVD deposition process.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Soo Young Fremont, US 263 13902
Furuta, Gaku Sunnyvale, US 53 1619
Hong, Ilyoung San Jose, US 3 91
Kurita, Shinichi San Jose, US 190 6437
Tiner, Robin L Santa Cruz, US 93 6004
Zhao, Lai Campbell, US 41 66
Zhou, Jianhua Campbell, US 140 4007

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