Methods and systems for generating process gases

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United States of America Patent

PATENT NO 11154792
APP PUB NO 20180229149A1
SERIAL NO

15751044

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Abstract

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Methods for the gas-phase delivery of gases, such as process gases, from the gas phase of a multicomponent source liquid are provided. The methods are generally directed to the generation of process gases having mass flow rates which are proportional to the input power delivered to the multicomponent source liquid containers. The methods may be used to deliver process gases to critical process applications.

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Patent Owner(s)

Patent OwnerAddress
RASIRC INC7815 SILVERTON AVENUE SAN DIEGO CA 92126

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Holmes, Russell J San Diego, US 36 283
Shamsi, Zohreh San Diego, US 4 15
Shepherd, Douglas El Cajon, US 5 14
Spiegelman, Jeffrey San Diego, US 4 17

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