Compositions and methods for removing ceria particles from a surface

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United States of America Patent

PATENT NO 11164738
APP PUB NO 20180204736A1
SERIAL NO

15874388

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Abstract

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A removal composition and process for cleaning post-chemical mechanical polishing (CMP) contaminants and ceria particles from a microelectronic device having said particles and contaminants thereon. The composition achieves highly efficacious removal of the ceria particles and CMP contaminant material from the surface of the microelectronic device without compromising the low-k dielectric, silicon nitride, or tungsten-containing materials.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cooper, Emanuel I Scarsdale, US 71 1001
Das, Atanu Danbury, US 3 9
Parson, Thomas Billerica, US 3 11
White, Daniela Ridgefield, US 60 396
White, Michael Billerica, US 218 6838

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