Artificial intelligence-enabled preparation end-pointing

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United States of America Patent

PATENT NO 11176656
APP PUB NO 20200279362A1
SERIAL NO

16409477

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Abstract

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Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124-5793

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Flanagan,, IV John F Hillsboro, US 4 11
Larson, Brad Portland, US 17 106
Miller, Thomas Gary Portland, US 4 2
Routh,, Jr Brian Beaverton, US 6 3
Shrotre, Aditee Hillsboro, US 4 2
Young, Richard Beaverton, US 72 794

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