Small-angle x-ray scatterometry

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United States of America Patent

PATENT NO 11181490
SERIAL NO

17254281

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Abstract

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An x-ray apparatus, that may include a mount that is configured to hold a sample; an x-ray source, that is configured to direct an x-ray beam toward a first side of the sample; a detector, positioned downstream to a second side of the sample, the detector is configured to detect, during a sample measurement period, at least a part of x-rays that have been transmitted through the sample; and an x-ray intensity detector that is positioned, during a beam intensity monitoring period at a measurement position that is located between the x-ray source and the first side of the sample, so as to detect at least a part of the x-ray beam before the x-ray beam reaches the sample.

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Patent Owner(s)

Patent OwnerAddress
BRUKER TECHNOLOGIES LTDP O BOX 103 MIGDAL HAEMEK 23100

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dikopoltsev, Alex Haifa, IL 17 205
Krokhmal, Alexander Haifa, IL 16 262
Vinshtein, Yuri Hadera, IL 7 26
Wormington, Matthew Highlands Ranch, US 29 342

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