Rotary table and roundness measuring apparatus
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United States of America Patent
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Dec 7, 2021
Grant Date -
Oct 24, 2019
app pub date -
Apr 10, 2019
filing date -
Apr 19, 2018
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A rotary disk rotatable around a vertical rotation axis; a bearing supporting the rotary disk so as to be freely rotatable; a slide disk slidable on a top surface of the rotary disk; a position adjustment bracket that displaces the slide disk along the top surface of the rotary disk; a placement disk that is supported by the slide disk; a plurality of air nozzles that are arranged on a top surface of the stator in an annular shape centered on the rotation axis, and form a static pressure air film between the top surface of the stator and a bottom surface of the rotary disk; an aerostatic pocket formed between the top surface of the rotary disk and a bottom surface of the slide disk; and a communication aperture is formed on the rotary disk and introduces pressure of the static pressure air film into the aerostatic pocket.
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