Substrate processing system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11251056
APP PUB NO 20190341278A1
SERIAL NO

16351385

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Abstract

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A substrate processing system includes: first and second process tubes spaced apart from each other in a first axial direction to provide process spaces independent from each other; a substrate boat on which a plurality of substrates are multiply stacked and which is provided to each of process spaces of the first and second process tubes; and first and second boat elevation units provided to the first and second process tubes, respectively, to elevate the substrate boat, wherein each of the first and second boat elevation units includes an elevation shaft member disposed in a space between the first and second process tubes.

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Patent Owner(s)

Patent OwnerAddress
EUGENE TECHNOLOGY CO LTDYONGIN-SI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Gyu Ho Yongin-Si, KR 7 8
Kang, Sung Ho Hwaseong-Si, KR 51 285
Kim, Chang Dol Yongin-Si, KR 12 18
Oh, Sang Young Hwaseong-Si, KR 2 6

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