Roll-to-roll surface treatment device, and film deposition method and film deposition device using same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11261520
APP PUB NO 20190226080A1
SERIAL NO

16327264

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed herein is a roll-to-roll long base material surface processing device capable of performing surface processing on a long base material with little occurrence of wrinkling in the long base material at low costs. The surface processing device includes: two can rolls that cool a long resin film transferred in a roll-to-roll manner in a vacuum chamber with a cooling medium circulated therein by wrapping the long resin film around outer circumferences thereof; and surface processing units typified by magnetron sputtering cathodes provided so as to face the outer circumferences of the two can rolls, wherein a second can roll of the two can rolls other than a most upstream first can roll has a gas release mechanism that releases a gas from the outer circumference.

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO METAL MINING CO LTDTOKYO 105-8716

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okami, Hideharu Niihama, JP 14 40

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