Alignment mark, substrate and manufacturing method therefor, and exposure alignment method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11315882
APP PUB NO 20200201168A1
SERIAL NO

16634741

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Abstract

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An alignment mark includes an alignment region, a peripheral region and a shielding region. The alignment region has an outer contour; the peripheral region is disposed around at least a part of the outer contour of the alignment region; the shielding region is disposed around at least a part of the outer contour of the alignment region and is non-overlapped with the peripheral region; and the alignment region and the shielding region are opaque, and the peripheral region is at least partially transparent.

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Patent Owner(s)

Patent OwnerAddress
BOE TECHNOLOGY GROUP CO LTD100015 NO 10 JIUXIANQIAO ROAD BEIJING CHAOYANG DISTRICT BEIJING CITY BEIJING CITY 100015
ORDOS YUANSHENG OPTOELECTRONICS CO LTDORDOS EQUIPMENT MANUFACTURING BASE DONGSHENG DISTRICT ORDOS INNER MONGOLIA 017020

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hui, Xiang Beijing, CN 6 7
Li, Jian Beijing, CN 1062 5232
Ma, Chunhong Beijing, CN 6 7
Ma, Qinglin Beijing, CN 34 789
Wang, Li Beijing, CN 972 6677
Wang, Xiongwei Beijing, CN 16 28
Zhao, Baojie Beijing, CN 8 12
Zhao, Yan Beijing, CN 300 2671
Zhou, Conghui Beijing, CN 1 0

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