System and method for generating and analyzing roughness measurements and their use for process monitoring and control

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United States of America Patent

PATENT NO 11355306
APP PUB NO 20210142977A1
SERIAL NO

17097735

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Abstract

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An edge detection system is disclosed. The edge detection system includes an imaging device configured for imaging a pattern structure to form a first image, wherein the pattern structure includes a predetermined feature, and the imaging device images the pattern structure to generate measured linescan information that includes image noise. The edge detection system includes a processor, coupled to the imaging device, configured to receive the measured linescan information including image noise from the imaging device, wherein the processor is configured to: apply the measured linescan information to an inverse linescan model that relates the measured linescan information to feature geometry information, determine, from the inverse linescan model, feature geometry information that describes feature edge positions of the predetermined feature corresponding to the measured linescan information, determine from the feature geometry information at least one metric that describes a property of the edge detection system.

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Patent Owner(s)

Patent OwnerAddress
FRACTILIA LLCAUSTIN TX

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mack, Chris Austin, US 29 350

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