Cleaning apparatus for heat exchanger and polishing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11383345
APP PUB NO 20200306920A1
SERIAL NO

16824281

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A cleaning apparatus capable of effectively removing dirt attached to a bottom surface of a heat exchanger, is disclosed. The cleaning apparatus cleans the heat exchanger for regulating a surface temperature of a polishing pad. This cleaning apparatus includes: a moving mechanism configured to move the heat exchanger between a temperature-regulating position in which the heat exchanger can exchange heat with the polishing pad, and a retreat position in which the heat exchanger is separated from a surface of the polishing pad; and a cleaning mechanism configured to clean a bottom surface of the heat exchanger moved to the retreat position The retreat position is located on a side of the polishing pad. The cleaning mechanism includes at least one cleaning nozzle for ejecting a cleaning liquid to the bottom surface of the heat exchanger, or a cleaning tank in which the bottom surface of the heat exchanger can be immersed.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATIONOTA-KU TOKYO 144-8510

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kamiki, Keisuke Tokyo, JP 8 6
Maruyama, Toru Tokyo, JP 95 796
Motoshima, Yasuyuki Tokyo, JP 43 346
Uozumi, Shuji Tokyo, JP 12 5

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