Atomic beam generator, bonding apparatus, surface modification method, and bonding method

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United States of America Patent

PATENT NO 11412607
APP PUB NO 20210037637A1
SERIAL NO

17072361

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Abstract

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An atomic beam generator includes a cathode constituted as a housing having an emission surface provided with an irradiation port through which an atomic beam is emissive; an anode disposed inside the cathode to generate plasma between the cathode and the anode; and a magnetic field generating unit including a first magnetic field generating unit that generates a first magnetic field and a second magnetic field generating unit that generates a second magnetic field, and guiding positive ions produced in the cathode to the emission surface by generating, in the cathode, the first magnetic field and the second magnetic field both parallel to the emission surface such that a magnetic field direction is leftward in the first magnetic field and is rightward in the second magnetic field when viewed from an emission surface side on condition of the first magnetic field being positioned above the second magnetic field.

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Patent Owner(s)

Patent OwnerAddress
NGK INSULATORS LTD2-56 SUDA-CHO MIZUHO-KU NAGOYA-SHI AICHI 467-8530
NATIONAL UNIV CORP TOKAI NATIONAL HIGHER EDUCATION & RESEARCH SYSTEM1 FURO-CHO CHIKUSA-KU NAGOYA-SHI AICHI-PREFECTURE 464-8601

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akao, Takayoshi Kasugai, JP 49 522
Hata, Seiichi Nagoya, JP 18 460
Hirai, Yuuki Nagoya, JP 1 0
Nagae, Tomoki Nagoya, JP 25 84
Sakurai, Junpei Nagoya, JP 2 3
Takahashi, Tomonori Chita, JP 121 1303
Tsuji, Hiroyuki Nagoya, JP 167 1769

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