Adhesive silicon oxynitride film

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11427731
APP PUB NO 20190292410A1
SERIAL NO

15934708

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Abstract

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The invention relates generally to use of a silicon oxynitride film which exhibits desirable physical and chemical properties; superiority in adhesion to metals including noble metals and other metals, transparent conductive oxides, and semiconductor materials compared to silicon dioxide and silicon nitride; is wet-etchable, dry-etchable, or both; and operates as a high-performance overcoat barrier dielectric. The silicon oxynitride film meets performance requirements via a process that does not require an adhesion layer for deposition, and does not contaminate, obscure, or damage the device through incorporation or processing of additional adhesion layers.

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Patent Owner(s)

Patent OwnerAddress
TELEDYNE DIGITAL IMAGING INC77 KING STREET WEST SUITE 400 TORONTO-DOMINION CENTRE TORONTO ONTARIO M5K 0A1

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fitzpatrick, Glen Edmonton, CA 3 1

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