Polishing table and polishing apparatus having ihe same

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United States of America Patent

PATENT NO 11433502
APP PUB NO 20180345447A1
SERIAL NO

15996988

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An object of the present invention is to provide a polishing table capable of preventing peeling or detachment of a coating of the polishing table, thereby to enable an operation for replacement of a polishing pad to be easily conducted. One embodiment of the present invention provides a polishing table having a support surface configured to support a polishing pad, the polishing pad being adapted to be used for polishing a substrate, the polishing table comprising: a stacked body comprising a stack of a porous layer and a non-porous layer, the porous layer including open pores formed in a surface thereof disposed to face a polishing pad; and a resin-based coating material disposed in the open pores so as to form at least a part of the support surface of the polishing table.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 1448510

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kosuge, Ryuichi Tokyo, JP 29 213
Saito, Kenichiro Tokyo, JP 61 824

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