High-precision etching method

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United States of America Patent

PATENT NO 11447876
APP PUB NO 20210222303A1
SERIAL NO

16962084

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Abstract

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An embodiment of the present disclosure provides an etching method, having the following steps: forming a modified layer having a thickness of one or several atom layers on a selected region of a surface of a semiconductor material layer by using a modifier; and removing the modified layer. When a semiconductor is processed, this method achieves precise control over the etching thickness and improves the etching rate at the same time.

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Patent Owner(s)

Patent OwnerAddress
THE INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCESNO 3 BEITUCHENG WEST ROAD CHAOYANG DISTRICT BEIJING 100029

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Du, Anyan Beijing, CN 3 1
Li, Chen Beijing, CN 352 2814
Yin, Xiaogen Beijing, CN 6 3
Zhang, Yongkui Beijing, CN 8 40
Zhu, Huilong Poughkeepsie, US 705 13304

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