Pattern height information correction system and pattern height information correction method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11448663
APP PUB NO 20210080485A1
SERIAL NO

16984813

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

This invention is directed to a pattern height information correction system which includes a contour line information of a pattern extracted from an acquired image including at least an AFM (atomic force microscope) module, a design information database that stores design information including at least layer information, and a computer system that divides the extracted pattern into regions based on the design information stored in the design information database relating to the extracted pattern and associates the divided regions with layer information, in which the computer system specifies a horizontal region designated as horizontal in advance from the divided regions, creates an approximated curved surface based on the specified horizontal region corresponding to the same layer information, and corrects height information of the extracted pattern using the approximated curved surface.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
HITACHI HIGH-TECH CORPORATIONTOKYO 105-6409

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kagetani, Ryugo Tokyo, JP 3 1
Kashiwa, Taeko Tokyo, JP 1 1
Shindo, Hiroyuki Tokyo, JP 86 515
Yamasaki, Kenji Tokyo, JP 29 160

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Mar 20, 2026
7.5 Year Payment $3600.00 $1800.00 $900.00 Mar 20, 2030
11.5 Year Payment $7400.00 $3700.00 $1850.00 Mar 20, 2034
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00