Metal mask substrate for vapor deposition, metal mask for vapor deposition, production method for metal mask substrate for vapor deposition, and production method for metal mask for vapor deposition

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United States of America Patent

PATENT NO 11453940
APP PUB NO 20200399770A1
SERIAL NO

17013535

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Abstract

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A vapor deposition metal mask substrate includes a nickel-containing metal sheet including a obverse surface and a reverse surface, which is opposite to the obverse surface. At least one of the obverse surface and the reverse surface is a target surface for placing a resist layer. The target surface has a surface roughness Sa of less than or equal to 0.019 μm. The target surface has a surface roughness Sz of less than or equal to 0.308 μm.

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Patent Owner(s)

Patent OwnerAddress
TOPPAN PRINTING CO LTDTOKYO 110-0016

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujito, Daisei Tokyo, JP 7 60
Mikami, Naoko Tokyo, JP 24 317
Nishi, Takehiro Tokyo, JP 10 70
Nishitsuji, Kiyoaki Tokyo, JP 15 89
Shinno, Mikio Tokyo, JP 10 53
Tamura, Sumika Tokyo, JP 5 46

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