Method of using a processing oven

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United States of America Patent

PATENT NO 11456274
SERIAL NO

17686514

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Abstract

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A method of using an oven includes supporting a substrate on a rotatable spindle in a processing chamber of the oven and rotating the substrate. The method may also include raising the spindle with the substrate to a heating zone and activating a lamp assembly to heat a top surface of the substrate. The substrate may then be lowered to a dosing zone and a chemical vapor directed into the processing chamber above the substrate. The substrate may then be further heated using the lamp assembly and cooled.

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Patent Owner(s)

  • YIELD ENGINEERING SYSTEMS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jing, Lei Santa Clara, US 33 82
Karim, M Ziaul San Jose, US 37 1928
Sautter, Kenneth Sunnyvale, US 7 2

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