Gamma ray generator and gamma ray lithography system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11460779
APP PUB NO 20210341845A1
SERIAL NO

17378801

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Abstract

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A gamma ray generator includes a plate, a plurality of holes and a plurality of gamma ray sources. The plate is configured to rotate along a rotational axis. The holes are disposed in the plate, and the holes are arranged in a matrix. The gamma ray sources are respectively placed in the holes.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chou, You-Hua Hsinchu, TW 118 1212
Chuang, Kuo-Sheng Hsinchu, TW 52 211

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