Switch matrix design for beam image system

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United States of America Patent

PATENT NO 11476085
APP PUB NO 20200227229A1
SERIAL NO

16648385

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Abstract

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Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dong, Zhonghua Sunnyvale, US 27 70
Lai, Rui-Ling Chang-Hua, TW 11 22
Wang, Yongxin San Ramon, US 56 100

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