Coating head of mist coating film formation apparatus and maintenance method of same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 1, 2022
Grant Date -
Jun 4, 2020
app pub date -
May 31, 2017
filing date -
May 31, 2017
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
According to an embodiment of the invention, a coating head of a mist coating film formation apparatus including a main body is provided. The main body includes a top plate in which a supply port capable of supplying one of a cleaning liquid or a mist of a source material solution is provided, a bottom plate provided below the top plate in a vertical direction, and a sidewall provided between the top plate and the bottom plate; and the sidewall includes an upper end and a lower end connected respectively to the top plate and the bottom plate and forms an interior space with the top plate and the bottom plate. The sidewall includes a slit spraying the mist externally from the interior space, and a recovery port capable of recovering the supplied cleaning liquid or a mist coalescing in the interior space. The bottom plate includes a slope having a height becoming lower from an inner perimeter of the sidewall toward the recovery port.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully