Derivatized polyamino acids

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United States of America Patent

PATENT NO 11492514
APP PUB NO 20210206920A1
SERIAL NO

17123295

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Abstract

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A composition comprises, consists of, or consists essentially of a polymer including a derivatized amino acid monomer unit. A chemical mechanical polishing composition includes a water based liquid carrier, abrasive particles dispersed in the liquid carrier, and a cationic polymer having a derivatized amino acid monomer unit. A method of chemical mechanical polishing includes utilizing the chemical mechanical polishing composition to remove at least a portion of a metal or dielectric layer from a substrate and thereby polish the substrate.

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Patent Owner(s)

Patent OwnerAddress
CMC MATERIALS LLC1209 ORANGE STREET WILMINGTON DE 19801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bailey, David Victor, US 60 4468
Dockery, Kevin P Aurora, US 19 71
Ivanov, Roman A Aurora, US 9 2
Shukla, Deepak Webster, US 183 2508
Zhang, Na Naperville, US 248 911

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