Method and composition for etching molybdenum

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United States of America Patent

PATENT NO 11492709
APP PUB NO 20210324525A1
SERIAL NO

17230633

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Abstract

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An etchant composition and method for etching molybdenum from a microelectronic device at an etch rate are described. A microelectronic device is contacted with an etchant composition for a time sufficient to at least partially remove the molybdenum. The etchant composition comprises at least one oxidizing agent, at least one oxidizing agent stabilizer, and at least one base and has a pH of from 7.5 to 13. The etchant composition selectively removes molybdenum at an etch rate of 5-200 Å/min.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chae, SeungHyun Gunpo, KR 7 14
Cooper, Emanuel I Scarsdale, US 71 1001
Das, Atanu K Danbury, US 10 5
Hong, Eric Seongnam, KR 13 42
Hong, SeongJin Cheongju, KR 15 22
Kim, WonLae Gunpo, KR 11 11
Lippy, Steven A Brookfield, US 4 11
White, Daniela Ridgefield, US 60 396
White, Michael L Ridgefield, US 50 2004
Yang, JeongYeol Gunpo, KR 6 2
Yeo, Juhee Suwon, KR 8 2

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