Hybrid EO polymer modulator with ALD sealant layer

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United States of America Patent

PATENT NO 11506918
SERIAL NO

17335375

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Abstract

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An EO polymer modulator with conformal atomic layer deposition sealant layers including an active region of a device material stack with an elongated tapered active section positioned on a passive waveguide core. The device material stack supported on a substrate with the passive waveguide core defining light input and light output side surfaces. A conformal atomic layer deposition sealant layer overlying the device material stack including the light input and light output side surfaces, the conformal atomic layer deposition sealant layer defining windows for the light input and light output side surfaces.

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Patent Owner(s)

Patent OwnerAddress
LIGHTWAVE LOGIC INCENGLEWOOD CO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Baoquan Lone Tree, US 31 983
Lebby, Michael San, US 94 985
Liu, Zhiming Parker, US 45 630

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