Fluid composition and method for conducting a material removing operation

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United States of America Patent

PATENT NO 11518913
APP PUB NO 20210062045A1
SERIAL NO

17004988

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Abstract

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A fluid composition suitable for chemical mechanical polishing a substrate can in include a multi-valent metal borate, at least one oxidizer, and a solvent. The fluid composition can be essentially free of abrasive particles and may achieve a high material removal rate and excellent surface finish.

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Patent Owner(s)

Patent OwnerAddress
SAINT-GOBAIN CERAMICS & PLASTICS INCONE NEW BOND STREET WORCESTER MA 01615

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bui, Long Huy Orange, US 4 0
Fu, Lin Rancho Palos Verdes, US 84 436
Sherlock, Jason A Anaheim, US 8 17
Ward, Douglas E Santa Ana, US 14 36

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