Condenser and semiconductor processing machine

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11519669
APP PUB NO 20220349654A1
SERIAL NO

17442676

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Abstract

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A condenser and semiconductor processing machine, relating to the art of semiconductor equipment. The condenser 100 includes a sealed cavity; wherein, a gas passage is provided in the sealed cavity; cooling liquid is filled around the gas passage; a gas inlet, a gas outlet, and a liquid outlet are provided on the sealed cavity, the gas inlet is communicated with the inlet of the gas passage, the gas outlet is communicated with the outlet of the gas passage, and the liquid outlet is communicated with the gas passage; the gas passage is a Tesla valve structure passage.

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Patent Owner(s)

Patent OwnerAddress
CHANGXIN MEMORY TECHNOLOGIES INCHEFEI CITY ANHUI 230000

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Li, Tianlong Hefei, CN 9 3

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